Dissociation of the FEBID precursor cis-Pt(CO)2Cl2 driven by low-energy electrons

Abstract

In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)₂Cl₂. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)₂Cl₂. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.