Issue 5, 2011

A rapid and economical method for profiling feature heights during microfabrication

Abstract

Quality control is an important and integral part to any microfabrication process. While the widths of features often can be easily assessed by light microscopy, the heights of the fabricated structures are more difficult to determine. Here, we present a rapid, accurate, and low-cost method to measure the heights of microfabricated structures during and after the fabrication process. This technique is based on white-light interferometry, which offers accuracy on the submicrometre scale.

Graphical abstract: A rapid and economical method for profiling feature heights during microfabrication

Supplementary files

Article information

Article type
Technical Note
Submitted
01 Oct 2010
Accepted
15 Dec 2010
First published
13 Jan 2011

Lab Chip, 2011,11, 974-977

A rapid and economical method for profiling feature heights during microfabrication

G. S. Yen, B. S. Fujimoto, T. Schneider, D. T.K. Huynh, G. D.M. Jeffries and D. T. Chiu, Lab Chip, 2011, 11, 974 DOI: 10.1039/C0LC00470G

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