Issue 20, 1977

Chemical vapour deposition of transition-metal silicides by pyrolysis of silyl transition-metal carbonyl compounds

Abstract

Pyrolysis of [Co(CO)4(SiH3)], [Fe(CO)4(SiH3)2], and [Mn(CO)5(SiH3)] at 773 K in a flow system affords the transition-metal silicldes CoSi, β-FeSi2 and MnSi–Mn5Si3 respectively. Static pyrolysis of [Mn(CO)5(SiH3)] gives only amorphous solid products which contain, in addition to metal and silicon, appreciable quantities of carbon, hydrogen, and oxygen.

Article information

Article type
Paper

J. Chem. Soc., Dalton Trans., 1977, 2058-2061

Chemical vapour deposition of transition-metal silicides by pyrolysis of silyl transition-metal carbonyl compounds

B. J. Aylett and H. M. Colquhoun, J. Chem. Soc., Dalton Trans., 1977, 2058 DOI: 10.1039/DT9770002058

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