Issue 10, 2014

Grazing incidence X-ray fluorescence of periodic structures – a comparison between X-ray standing waves and geometrical optics calculations

Abstract

Grazing incidence X-ray fluorescence spectra of nano-scaled periodic line structures were recorded at the four crystal monochromator beamline in the laboratory of the Physikalisch-Technische Bundesanstalt at the synchrotron radiation facility BESSY II. For different tilt angles between the lines and the plane of incidence of the monochromatic synchrotron radiation, spectral features are observed which can be understood and explained with calculations of the emerging X-ray standing wave (XSW) field. On the other hand, there are structures, i.e., pronounced modulations above the substrate's critical angle of external total reflection, which are not included in the XSW concept. Novel geometrical optics calculations can reproduce these structures taking the sample's specific geometric conditions into account.

Graphical abstract: Grazing incidence X-ray fluorescence of periodic structures – a comparison between X-ray standing waves and geometrical optics calculations

Associated articles

Article information

Article type
Paper
Submitted
27 May 2014
Accepted
03 Jul 2014
First published
03 Jul 2014
This article is Open Access
Creative Commons BY license

J. Anal. At. Spectrom., 2014,29, 1778-1784

Author version available

Grazing incidence X-ray fluorescence of periodic structures – a comparison between X-ray standing waves and geometrical optics calculations

F. Reinhardt, S. H. Nowak, B. Beckhoff, J. Dousse and M. Schoengen, J. Anal. At. Spectrom., 2014, 29, 1778 DOI: 10.1039/C4JA00164H

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