Self-catalysis induced three-dimensional SiOx nanostructures

Abstract

Three-dimensional SiO_x nanostructures with various shapes have been prepared by chemical vapor deposition. The sunflower-like SiO_x nanostructures provide a chance to probe the growth process. A typical Ga-assisted vapor–liquid–solid (VLS) model is responsible for the incipient SiO_x nanostructures, while the growth of their branches is governed by a SiO_x self-catalysis mechanism. Elemental analysis unveils the initial stage and evolution of SiO_x nanostructure formation. The optical properties of SiO_x nanostructures are also investigated.