An overview of applications of infrared spectrometric ellipsometry for characterizing samples which consist of a metal, semiconductor or organic layer on a variety of substrates is given. The thicknesses addressed cover the entire nanometer range. Both anisotropy and inhomogeneity of the layers are considered.
E. H. Korte and A. Röseler, Analyst, 1998, 123, 647 DOI: 10.1039/A707112D
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