Deposition of thin films of CdSe or ZnSe by MOCVD using simple air stable precursors

Abstract

The air-stable bis-complexes of methyl (n-hexyl)diselenocarbamate with cadmium or zinc have been shown to be effective precursors for the deposition of the metal chalcogenides by MOCVD; studies of their thermal decomposition mechanism provide possible explanations as to why these complexes are effective whilst simpler ones are not.