A nonoxidic sol–gel route to titanium nitride and carbonitride films by primary aminecondensation

Abstract

A solution phase route to films of nanocrystalline titanium nitride and carbonitride is reported. Transamination of Ti(NMe₂)₄ with primary amines results in primary amide groups which can self condense forming alkylimide bridges. The use of controlled amounts of amine results in sols in tetrahydrofuran; these can be coated onto silica substrates via a dip coating method. Pyrolysis of these films under ammonia or nitrogen leads to TiN and Ti(C,N) respectively.