Reference-free X-ray spectrometry based on metrology using synchrotron radiation

Abstract

X-ray spectrometry is a wide spread technique for revealing reliable information concerning the elemental composition and binding state in various materials. Reference-free quantitation in X-ray spectrometry is based on the knowledge of both the instrumental and fundamental atomic parameters. Instrumental or experimental parameters involve the radiant power and spectral purity of the excitation radiation, the beam geometry, the solid angle of detection, and the response behavior and efficiency of the detector. The reliability of the quantitation equally depends on the relative uncertainty of the atomic fundamental parameters involved. Both the values and estimated uncertainty of atomic fundamental parameters given in the literature can be improved by dedicated experiments: By means of transmission and fluorescence experiments with tunable synchrotron radiation, the mass absorption coefficient and fluorescence yield of Al was determined. Furthermore, the transition probabilities of the fluorescence lines belonging to the Cu-L_iii and L_ii subshells were determined using a superconducting tunnel junction detector offering an energy resolution of about 10 eV in the soft X-ray range. Selected techniques and applications of reference-free X-ray spectrometry are presented. A particular advantage of reference-free quantitation modes is their capability to directly probe new materials without the need to wait for appropriate standard reference materials.