Biomimetic bi-functional silicon nanospike-array structures prepared by using self-organized honeycomb templates and reactive ion etching

Abstract

We demonstrate here a creation of a novel biomimetic bi-functional surface by using dry etching of silicon with a self-organized porous polymer. The novel silicon structures with hierarchical nanospike-array structures covered with fluorocarbons were fabricated by dry etching of silicon through the porous polymer masks. The anti-reflection and superhydrophobic properties were realized due to their large surface areas and low surface energies. These masks and silicon substrates offer great advantages and are suitable for various practical applications, including high efficiency solar cells.