High density multiplication of graphoepitaxy directed block copolymerassembly on two-dimensional lattice template

Abstract

Generating high density-multiplied nanopatterns through the directed self-assembly of block copolymers (BCPs) will significantly influence the current microelectronics and storage industries. Here, we provide a two-dimensional (2D) sparse rectangle lattice template to direct the equilibrium morphologies of block copolymers. The areal density of the substrate is multiplied by a factor of 34 through the self-assembled BCP microdomains without losing the long-range order. Local spacings of the BCP microdomains and their orientation can be modulated by template spacings. The selection of optimal templates for specific applications is summarized in the phase diagram based on the template spacings. The suggested approach provides a candidate to enhance the performance of current semiconductor devices, especially ultrahigh-density data storage media.