Soft-lithographic processed soluble micropatterns of reduced graphene oxide for wafer-scale thin film transistors and gas sensors

Jia Zhang; PingAn Hu; Rongfu Zhang; Xiaona Wang; Bin Yang; Wenwu Cao; Yibin Li; Xiaodong He; Zhenlong Wang; William O'Neill

doi:10.1039/C1JM14071J

Soft-lithographic processed soluble micropatterns of reduced graphene oxide for wafer-scale thin film transistors and gas sensors†

Jia Zhang,^a PingAn Hu,*^a Rongfu Zhang,^a Xiaona Wang,^a Bin Yang,^b Wenwu Cao,^b Yibin Li,^c Xiaodong He,^c Zhenlong Wang^a and William O'Neill^d

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* Corresponding authors

^a Key Lab of Microsystem and Microstructure, Harbin Institute of Technology, Ministry of Education, No. 2 YiKuang Street, Harbin, P.R. China
E-mail: hupa@hit.edu.cn

^b Department of Physics, Harbin Institute of Technology, Harbin, P.R.China

^c Center for Composite Materials, School of Astronautics, Harbin Institute of Technology, P.R.China

^d Centre for Industrial Photonics, Institute for Manufacturing, Department of Engineering, University of Cambridge, 17 Charles Babbage Road, Cambridge, UK

Abstract

PDMS based imprinting is firstly developed for patterning of rGO on a large area. High quality stripe and square shaped rGO patterns are obtained and the electrical properties of the rGO film can be adjusted by the concentration of GO suspension. The arrays of rGO electronics are fabricated from the patterned film by a simple shadow mask method. Gas sensors, which are based on these rGO electronics, show high sensitivity and recyclable usage in sensing NH₃.

Journal of Materials Chemistry

Soft-lithographic processed soluble micropatterns of reduced graphene oxide for wafer-scale thin film transistors and gas sensors†

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Soft-lithographic processed soluble micropatterns of reduced graphene oxide for wafer-scale thin film transistors and gas sensors

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