Issue 8, 2013

Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

Abstract

We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e.g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.

Graphical abstract: Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

Supplementary files

Article information

Article type
Paper
Submitted
19 Oct 2012
Accepted
04 Feb 2013
First published
06 Feb 2013

Lab Chip, 2013,13, 1626-1631

Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

Y. Liao, Y. Cheng, C. Liu, J. Song, F. He, Y. Shen, D. Chen, Z. Xu, Z. Fan, X. Wei, K. Sugioka and K. Midorikawa, Lab Chip, 2013, 13, 1626 DOI: 10.1039/C3LC41171K

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