Novel dithio- and diseleno-carbamates of zinc and cadmium as single-molecule precursors for low-pressure metal-organic chemical vapour deposition

Abstract

Four compounds with the empirical formula M[E₂CN(Me)CH₂CH₂CH₂NMe₂]₂(M = Zn 1 or Cd 2, E = S; M = Zn 3 or Cd 4, E = Se) have been synthesised and characterised. They are potential single-molecule precursors for growth of Group II–Group VI materials by low-pressure metal–organic chemical vapour deposition (LP-MOCVD). X-Ray crystallographic characterisation of 1–3 revealed three fundamentally different structural types in the most readily crystallised forms: 2 consists of discrete dimers, whereas 1 and 3 are polymeric. The LP-MOCVD experiments involving growth of ZnS films from 1 and attempts to grow ZnSe films using 3 are also discussed.